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A novel approach to electrochemically fabricate thin nanoporous silicon using ammonia fluoride solution is proposed and experimentally demonstrated. It is shown that highly uniform and thin nanoporous silicon layers (down to 50 nm) with high porosity can be formed in a reproducible manner under low current densities (0.01-0.1 mA/cm2) and low fluorine ion concentration (1%wt). Structural and opto-electrical...
In this paper we present the design, fabrication and test of a MEMS resonator including a field emission gauge for the measurement of the resonator movements. The device is made of an in plane vibrating structure containing electrostatic actuation electrodes as well as a dual tip field emission structure. One tip is fixed where the other, standing about one micron in front of it, is attached to the...
We present a micromechanical device designed to be used as a non-volatile mechanical memory. The structure is composed of a suspended slender nanowire (width: 100 nm, thickness: 430 nm, length: 8 to 30 mum) clamped at both ends. Electrodes are placed on each side of the nanowire to 1) actuate the structure during the data writing and erasing mode and 2) determine its position by measuring the capacitive...
In this paper, we present the design, simulation, fabrication, and some measurement and characterization of a novel 16-bit digital variable optical attenuator (VOA) that attenuates by switching individual mirror of an array as an attempt to achieve input voltage variation independence and output linearization. The design was aided by a simulation package that features coupled electrostatic and mechanical...
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