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This paper presents the design and fabrication of a switchable band pass filter based on barium strontium titanate (Ba0.7Sr0.3TiO3) thin film materials. This filter is designed and fabricated as a solidly mounted resonator (SMR) using spin-on metal organic solution decomposition. It consists of six film bulk acoustic resonators (FBARs), two series and four shunt. Without voltage biasing, there is...
BAW resonators and filters with BST thin film are attracting the attention of many investigators because of their tunability and ability to switch with the applied bias voltage. In this paper, we will present our work on solidly mounted bulk acoustic resonators, filters and duplexers with spin-on metal organic solution deposited (MOSD) Barium Strontium Titanate(BST) films. Our recent research has...
A solidly mounted tunable barium strontium GaN/Sapphire substrate using a metalorganic solution deposition (MOSD) technique. An acoustic Bragg reflector was first formed on the GaN/sapphire substrate consisting of alternating layers of silicon dioxide and tantalum oxide deposited using a-spin on technique. Lower and upper electrodes were fabricated using sputter deposited platinum. The resonant frequency...
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