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For the first time, we demonstrate experimentally high optical quality factor Q ~9000 in MEMS-compatible silicon Fabry-Pérot (FP) resonators based on free space propagation of light and direct coupling to optical fiber. This result is obtained on long cavity resonators (L >; 250 μm), a usually difficult case in terms of power loss. The resonator design includes two multilayered silicon-air Bragg...
In this paper, we introduce a novel design for high performance silicon-based Fabry-Pérot cavities and its corresponding design model. According to the design model, the new design shows higher stability, lower insertion losses and higher quality factor. Our methodology was based on one hand, on taking advantage of light reflection and refraction over curved surfaces with curvatures along 2 orthogonal...
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