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This paper reports on measurement of landing force of a fruit fly (Drosophila melanogaster) using a MEMS force plate. By measuring the landing force of fruit flies, we found that the maximum force correlated with the landing velocity, which varied from several to 80 times larger than its weight. The experimental result suggested that there was the threshold value of the maximum landing force per weight...
This paper reports on a method to measure spring constant of hydrogel microparticles by a MEMS sensor. For calculating spring constant, not only force but also displacement is necessary. The MEMS sensor consists of two sidewall doped piezoresistive cantilevers in the ranges of μΝ and μm so that both parameters can be measured simultaneously. When one cantilever pushes a target to a wall, the cantilever...
This paper reports a cantilever with 10-fold tunable spring constant. The spring constant can be tuned both larger and smaller using Lorentz force generated by direct current which flows through the wiring on the cantilever. We designed the cantilever so that the maximum spring constant change by Lorentz force can be the same order as initial spring constant. The change of the spring constant was...
This paper reports an airflow shear stress sensor whose sensitivity is enhanced by modifying the surface roughness. The sensor consists of a cantilever-typed shear stress sensor and a micro pillar array on the surface of the cantilever. Piezoresistors are formed on the side walls of the cantilever's hinges to detect the shear force acting on the cantilever. When a shear airflow is applied to the proposed...
This paper reports a measurement method of vacuum pressure from 10−1 to 103 Pa with a piezoresistive cantilever-based differential pressure sensor (DPS). The gap around the cantilever of the DPS was narrow (2 μm) so that the air flow through it was suppressed. The through-hole beneath the sensor is connected to a chamber which is filled with saturated vapor. This method allows the pressure of the...
We describe the design and characterization of a 3-type heterogeneous 36-core, 3-mode fiber with record spatial channel count and density and perform transmission measurements in all 108 spatial channels using 40×100GHz spaced 25GBaud DP-QPSK signals.
This paper reports a quad-axial force sensor probe which can measure tri-axial forces and one torque around the probe. By forming piezoresistors three dimensionally on the probe supporting beams, four sensing element can detect quad-axial force/torque on the probe tip. We demonstrated that the fabricated sensor had condition number of 2.6 with force resolutions under 1.0 µN and torque resolution under...
This paper reports on a method to measure forces and torques acting on spike pins of sports shoes. We fabricated a 2 mm × 2 mm × 0.3 mm 6-axis force/torque sensor chip, which consists of 6 piezoresistive beams. From the resistance changes of the 6 beams, 6 components of forces and torques can be detected. The sensor chip was connected to a flexible printed circuit board (PCB) and covered with thin...
This paper reports on a shear stress sensor for airflow. The sensor consists of a plate, side-wall doped beams and surrounding membrane with narrow gaps. The sensor plate was 300 µm×350 µm×3 µm in size. The plate was supported by the side-wall doped beams, which can detect their horizontal deformation. The sensor structure was designed not to disturb target airflow circumstance owing to its flat surface...
We propose a device that can measure pulse waves at various points on human body with high sensitivity. Pulse wave velocity was calculated from a synchronized pulse wave measurement on two points. The device had a piezoresistive cantilever placed on silicone oil. The cantilever with oil was embedded in polydimethylsiloxane (PDMS). Pressure waves from arteries can be well conveyed to the cantilever,...
The paper repots on a multi-axial confocal distance sensor using a combination of varifocal liquid lens and a scanning mirror. The liquid lens can change its focal length only by applying a voltage. Thus the sensor can scan laser without using a long stroke actuators. From this point, the sensor size can be miniaturized to attach on hand-held observation equipment. We measured the surface posture...
We have developed silicon mixed films, using a technique that combines a mist-jet ejection of crystalline silicon microparticles with PE-CVD of amorphous silicon. Using the mist-jet technology, a water mist containing silicon microparticles is ejected on the substrate. The size of coated microparticles is sub-micron. An amorphous silicon film of 500 nm was deposited after a native silicon dioxide...
In this paper, we propose a sensor for measuring the three-dimensional (3D) velocity vector of airflows. The sensor, which was a 10 mm spherical figure, had a laminated structure with three channels fabricated inside. The components of the airflow velocity vector were measured respectively by three piezo-resistive cantilevers fabricated in each of the three channels. Experiments with a wind tunnel...
This paper reports an improved method for higher sensitivity of the thermopile infrared sensors .To increase the sensitivity of thermopile infrared sensors, the thermopile infrared sensors were bonded to the micro mirror arrays (MMA) which focused the infrared radiation in the infrared absorber. As the result, 4-pair thermopiles have demonstrated 220V/W to 350V/W under the pressure of 1Pa atmospheres,...
We developed Optical pH regulation using functional nanotool impregnated with photo-responsive chemical for selective cell injection of nanotool. The nanotool was modified by fluorescent dye for intracellular measurement. The nanotool was included in the fusogenic liposome. Membrane fusion of the liposome to the cell membrane was used for invasive cell injection of the nanotool. The liposome fuses...
A major problem for analysis of bio-nanoparticles such as the influenza viruses (size is about 100 nm) is that sample concentration is low. We developed manipulation of the single virus using optical tweezers supported by dielectrophoretic concentration of the viruses in a microfluidic chip. The microfluidic chip made of poly (dimethyl siloxane) (PDMS) is useful to achieve stable manipulation of the...
We developed selective cell injection of nanotool using photo responsive chemical for intracellular measurement. The nanotool was included in the fusogenic liposome. Membrane fusion of the liposome to the cell membrane was used for invasive cell injection of the nanotool. The liposome fuses to the cell in weak acidic condition. Local pH control inside the liposome was developed by using photo responsive...
A major problem for analysis of bio-nanoparticles such as the influenza viruses (size is about 100 nm) is that sample concentration is low. We developed manipulation of the single virus using optical tweezers supported by dielectrophoretic concentration of the viruses in a microfluidic chip. The microfluidic chip made of poly (dimethyl siloxane) (PDMS) is useful to achieve stable manipulation of the...
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