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In this paper, we present new results on the development of an original acoustic waveguides concept based on a Periodically Poled Lithium Niobate transducer. Periodically poled transducers have been investigated recently as an alternative to classical inter-digital transducers for the excitation and detection of guided acoustic waves. We expose here two different structures of RF resonators based...
In this work, electromechanical coupling factor, K2, and Temperature Coefficient of Frequency (TCF) of Bulk Acoustic Wave (BAW) resonators based on high aspect ratio ridge structures in 42°Y-X LiTaO3 (LT) and Z-cut LT single crystals with different Li stoichiometries were studied experimentally, analytically and by combined finite element / boundary element analysis. Initially, analytical analysis...
In this paper, we propose new structures based on “Silicon/PPLN thin film” hybrid wafers for nonlinear-optical and Radio-Frequency applications. This stack is obtained by home-made room-temperature bonding and wafer thinning techniques. Two main wafer bonding techniques have been developed on 3 and 4-inch wafers. The Au/Au bonding for RF applications and the Au/Au/SiO2 bonding for optical applications...
In this paper, we propose a new fabrication method to invert micrometric ferroelectric domains on lithium niobate wafers. Periodically poled lithium niobate (PPLN) is well used for nonlinear-optical applications and recently for radiofrequency applications. The fabrication process of PPLN, based on the application of an electric field on a 500 µm-thick lithium niobate (LiNbO3) Z-cut wafer is well...
The development of transducers alternative to usual surface acoustic wave (SAW) and bulk acoustic wave (BAW) devices for RF signal processing is strongly motivated by the need for improved operating characteristics to face modern telecommunication challenges. This paper shows the interest of a new concept of periodically poled transducers (PPT) on Lithium Niobate (LiNbO3). This new kind of transducer...
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