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In-line X-ray fluorescence (XRF) is demonstrated for Cu(In, Ga)Se2 (CIGS) co-evaporation source control. XRF is found to accurately measure film composition for direct metals source control, as well as an indirect monitor for selenium rate using the nature of the self-limiting diselenide. It was found that below an optimum Se flux value, the film growth rate is limited by the Se atom availability,...