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Acetone vapor monitoring is essential in workplace for human health and safety, where exposure to acetone concentration more than 176 parts per million (ppm) can cause damage to eyes, liver, kidneys and central nervous system. In addition, acetone in exhaled breath is known to be good biomarker for non-invasive screening of diabetes. The most common used acetone vapor sensors are based on metal oxide...
Relative humidity sensing is crucial in many applications. However, hysteresis, lack of stability and low accuracy still exist in some of the available humidity sensors. This paper studies the effect of changing the supported beams' length and width on the resonance frequency and mass sensitivity of a CMOS-MEMS resonator proposed for relative humidity sensing applications. The resonator is designed...
CMOS-MEMS resonators have found a broad usage in mass sensing applications especially in biomedical field. This paper reports theoretical calculations and Finite Element Method (FEM) simulation for a proposed microresonator for detection of acetone in exhaled breath as biomarker for diabetes. The resonator is 760 µm long and 340 µm wide with 1.461ng effective mass, 21.331 kHz natural resonance frequency,...
This paper presents a capacitive CMOS-MEMS resonator for mass detection. Mass detection is used in many applications such as chemical industries and biomedical diagnosis. The technique used for this work is two dies bonded in parallel direction to get change in the capacitance whenever there is a change in mass and the device is electro-statically actuated. The resonance frequency of the resonator...
Piezoelectric cantilevers have found a wide usage in sensor technologies for mass sensing and energy harvesting. This paper reports theoretical calculations, Finite Element Method (FEM) simulation and experimental measurements of mass detection using piezoelectric bimorph cantilever (PZT-5H) in macro (mm) scale. The dimensions of the cantilever are 33mm, 10mm, and 0.5mm for length, width, and thickness,...
A novel design of micro paddle bridge resonant magnetic field sensor based on electrostatic actuation and capacitive detection technique is characterized and simulated using CoventorWare. The sensor consists of Aluminum plus shape paddle bridge resonator with two proof mass arms, driving electrodes, sensing electrode and silicon substrate. Working in a resonant condition, the sensor's vibration amplitude...
Modeling and simulation of a microcantilever designed to achieve high resonant frequency on the sensing area is presented in this paper. Simple analytical models of the microcantilever are generated to achieve estimates of the device performance and to check the validity of the subsequent simulation. CoventorWare simulation software is used to design and process the micromachined microcantilever gas...
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