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This paper presents a performance comparison of three commonly-used MEMS springs: Double-folded, U-shaped and fish-hook, which are attached each to a same-size proof-mass constituting a mass-spring resonating system oscillating in-plane at 10 kHz. ANSYS Finite Element Analysis (FEA) is performed in order to compare the modal and static analysis among the springs. The effect of fabrication imperfection...