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In this paper, position control of electrostatically controlled linear actuator (ECLIA) utilizing feedback control and a micro potentiometer using a PDP connection is investigated. ECLIA comprises a PZT actuator, driving and holding electrodes, and multi sliders. The sliders are driven by a motion transmission of the PZT actuator and an electrostatic clutch mechanism. This produces stepwise motion...
This paper reports spatially arranged pyrolyzed polymer-gold probes to allow high-sensitivity monitoring of spatially distributed chemicals. Pyrolyzed polymer is a promising carbon material for applications of electrochemical sensors. Out-of-plane gold microelectrodes coated by polymer film (parylene-C) are transformed to conductive carbon-gold materials by annealing at 1000°C for 2h in a vacuum chamber...
In this paper, we present the design and fabrication of a new type of slider for ECLIA (Electrostatic Control Linear Actuator). The slider is composed of a flexible conductive polymer and Silicon bone structure, hereafter called Polymer-Si bone slider, in order to generate electrostatic and suction force for the clutch mechanism and pushing force of the slider. The Polymer-Si bone slider can improve...
This paper presents a MEMS potentiometer that uses a connection through a probe dipping into a μpool (hereafter PDP-connection). We proposed a PDP-connection to minimize physical restrictions that cause serious problems for microactuation. A PDP-connection employs a probe electrode that is dipped into a μpool filled with a conductive, nonvolatile liquid. A PDP-connection works as a variable resistor...
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