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The performance of AFM is determined by the control gains. The gains have uncertainties which are impacted by a cantilever, sample properties and environment. In commercial AFM, the controller is manually tuned by user. In this paper, auto gain tuning algorithm is suggested for the high performance and automation of AFM.
This paper presents vibration reduction control of a voice coil motor (VCM) nano scanner. We had developed a VCM scanner. The scanner has flexure hinges structure. However, the VCM nano scanner has some problems of thermal drift and small damping compared to the PZT driven nano scanner. Especially, the small damping coefficient of the VCM scanner causes mechanical vibration when the control input...
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