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We discuss in this paper the design of a new high-precision step-and-repeat camera with respect to its optics, mechanical design, control system, and control computer program. One micrometer images from a 5-mm-square lens field can be placed within 0.12 μm over a 10-cm × 10-cm area on photographic glass plate. Features such as, image plane control, inter-ferometric metering, and automatic reticle...
The continuing trend towards increasing complexity and decreasing feature size in integrated circuits is pushing photolithography to its limits. This is true for both mask generation and for the transfer of the mask pattern to the wafer. In mask making, step-and-repeat lenses are approaching their diffraction limits as feature sizes diminish and the overall pattern areas grow larger. In the case of...
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