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We present a polymer thermal bimorph microcantilever with integrated gold actuator and sensor. Our device reports an enhanced direct thermal response, and 30% increase in sensitivity compared to prior devices using NiChrome sensor. Releasing the cantilever from the substrate enhanced the response by a factor of 200, suggesting this technique to be advantageous over embedded ‘hot wire’ methods for...
Parallel scanning with arrays of AFM cantilevers has an advantage over conventional single AFM probes because of increased acquisition speed for sample imaging. A challenge for such large arrays is the simultaneous detection of deflection of a multitude of cantilevers. In addition, conventional AFM probes lack flexibility in cantilever array design, and material conventionally used is not soft enough...
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