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This paper presents a study on the feasibility of packaging a sensor element by a thin biocompatible coating. The goal of the work was twofold; Firstly to investigate the possible impact of the coating on sensor element performance; Secondly to examine the sensor element functionality after soaking into true human synovial fluid for more than 30 days. Sensor elements with two different structures...
The design, fabrication, and measurement results for a diaphragm-based single crystal silicon sensor element of size 820 μm × 820 μm × 500 μm are presented. The sensor element is designed for in vivo applications with respect to size and measurement range. Moreover, it is optimized for longtime operation in the human body through a built-in protection preventing biofouling on the piezoresistors. The...
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