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This paper reports a novel honeycomb-like disk resonator for gyroscopic application. Compared with the state of the art nested-rings disk resonator, the honeycomb-like disk resonator can provide more than two-fold higher immunity to the fabrication error, which means that structure imperfection could cause less relative frequency error. The honeycomb-like disk resonator also shows much higher resonant...
This paper reports a novel, low-cost and inherently simple vertical signal transmission method for glass-silicon-glass sandwich micro-electro-mechanical systems (MEMS) gyroscopes based on heavily doped silicon-bridge. As for the fabrication technique, only glass-to-silicon anodic bonding and after-laser-trimming process are needed, which are fully compatible with standard MEMS technology. Micro gyroscopes...
In micro-electro-mechanical system devices, the thermal stress and deformation caused by ambient temperature variation are of great concern since they can directly affect the performance of the devices. This paper presents an optimized temperature robustness design for double-clamped micro-structures. Robust operation over temperature is a critical criterion for most MEMS sensors, however different...
This paper focuses on a structural suppression method of modal coupling error in micromachined gyroscopes by UV laser trimming. A micromachined gyroscope which had a slanted suspension beam was adopted as an example in the experiment. The formation mechanism of modal coupling error and operation principle of structural suppression method were proposed. Laser trimming method was implemented on the...
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