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Localized high temperature due to Joule heating in Carbon Nanotubes (CNTs) can generate micron-sized bubbles. Electro-thermal property of CNTs-based microbubble generator is characterized by finite element analysis in this paper. Water circumstance with volume in micrometer scale covering solid elements of the microdevice was considered. Temperature distribution and power input corresponding to microbubble...
Development and preliminary characterization on the performance of a micro-bubble generator using carbon nanotubes (CNTs) as heating elements are presented. Dielectrophoretic force was used to align CNTs between fabricated micro-electrodes. The contacts between the CNTs and electrodes were fixed by patterned SiO2 thin film. Localized high temperature due to Joule-heating generated by an AC current...
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