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Portable low cost microplasma sources are of interest for various applications such as materials processing, treatment of biomedical materials, chemical analysis and optical radiation sources. Microplasma sources are especially of interest for atmospheric pressure operation because they do not require a vacuum system. Further, by using higher frequency energy (microwave) to power the microplasma discharge,...
Microwave plasma-assisted chemical vapor deposition (PACVD) reactors have been used extensively for the growth of diamond films. The design geometric features of these reactors vary to enable control and shaping of the electromagnetic fields and plasma discharge. In particular, the design and tuning of various geometric parameters is known to affect not only the electromagnetic field structure, but...
Self-consistent simulation of Microwave PACVD reactors at higher pressures is challenging as it involves coupling many different physical phenomena that are highly nonlinear. This paper presents a solution for these problems. Two major components of the simulation include a finite-difference frequency domain (FDFD) electromagnetic model, and a steady-state convective plasma flow model. These two components...
A multi-physics numerical simulation was developed for simulating the operation of a Microwave Plasma-Assisted Chemical Vapor Deposition (MPACVD) reactor for synthetic diamond growth. The major components of the simulation included a finite-difference frequency domain (FDFD) electromagnetic simulation; a steady-state plasma simulation (including the electron energy balance and continuity equations);...
It is now widely understood that CVD synthesized diamond quality and growth rates can be improved by using high power density microwave discharges operating at pressures above 160 Torr[1]. Thus we have developed microwave plasma reactor designs and associated process methods that are both robust and are optimized for high pressure and high power density operation and thereby take advantage of the...
In view of the important, recent, opportunity to commercially synthesize high quality single crystal diamond (SCD) there is a need to continue to improve existing microwave plasma assisted reactor designs that enable high quality and high deposition rate SCD synthesis. It is now widely recognized that both the quality and growth rates of microwave plasma assisted CVD (MPACVD) synthesized diamond are...
Microwave plasma-assisted chemical vapor deposition (PACVD) reactors have been used extensively for the growth of synthetic diamond. Simulations of such reactors have been developed in order to aid in the testing of new designs and parameters. Since this type of diamond growth has historically been carried out at relatively low pressures (less than 100 Torr), the plasma transport properties have been...
Portable low cost microplasma sources have various applications such as Bio-MEMs sterilization, chemical analysis systems and small scale materials processing. The application of microplasmas at atmospheric pressure is particularly attractive as it avoids the need for vacuum systems. Further, by using higher frequency energy (rf and microwave) to power the microplasma discharge, the erosion of electrodes...
Summary form only given. It is now widely recognized the CVD synthesized diamond quality and growth rates can be improved by using high power density microwave discharges operating at pressures above 180 Torr. However at high pressures these discharges separate from the walls of the discharge chamber and become freely floating taking on shapes that are related to the shape of the impressed electromagnetic...
Summary form only given. A microwave powered microplasma source is developed tested for materials processing on spatially localized areas by applying a small discharge to only the region being processed. The paper focuses on the modeling and characterization of this microplasma. A small diameter stream of plasma (less than 2 mm in diameter) is created by focusing microwave energy inside a discharge...
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