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This paper describes the laser-based structuring of piezoceramic actuators used in a mobile microrobot. The actuator has to meet several requirements. Firstly, the achieved positioning accuracy of the mobile platform should be in the single nanometer range. This leads to the use of piezoelectric ceramics, which support this demand. Secondly, as the robot needs to have up to three degrees of freedom...
This paper describes substantial investigations on stick-slip micro drives. The drives are the basis for miniaturized micro- and nanohandling robots, which are usually driven by piezo-actuators. Because of the reason that stick-slip drives are strongly connected with friction characteristics of the stick-slip contact, this paper focuses on several aspects of friction and the model. After an introduction...
Closed-loop nanorobot control performance is a key challenge for high-throughput nanohandling. The limited update rate, long latency and unpredictable jitter of tracking based on scanning electron microscope images are a major bottleneck for such closed-loop control. A new approach for high-speed position sensing relying on line scans of a scanning electron microscope is adapted into the control loop...
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