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A novel HfO 2 thin film with SF 6 plasma treatment as ion selective membrane on electrolyte–insulator–semiconductor structure for pH-sensor was proposed. The sensing characteristics on hydrogen ion detection and the non-ideal effects including drift effect, hysteresis phenomenon, and responses on interference ions were all presented in this article. The results show that the slight...
The potassium (K+) and sodium (Na+) ion-sensitive membranes treated by the carbon tetrafluoride (CF4) plasma by using plasma-enhanced chemical vapor deposition (PECVD) on the single HfO2 sensing films based on electrolyte-insulator-semiconductor (EIS) and ion sensitive filed-effect transistor (ISFET) were proposed in this work. With CF4 plasma treatment, the fluorinated-EIS exhibits higher pK-sensitivity...
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