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This work reports a piezoelectrically driven and sensed Circular Diaphragm Resonator (CDR) mass sensor. The work is a development of an electrostatically-activated version and aims to simplify the microfabrication process and signal recovery electronics. A range of device geometries were fabricated and both optical and electrical testing performed to assess performance. Electrical sensing, using a...
The present work describes a methodology for patterning biomolecules on silicon analytical devices, such as novel Bio-MEMS or conventional biosensors, that reconciles three-dimensional (3-D) biological functionalisation with standard resist lift-off techniques. Unlike classic sol-gel approaches in which the biomolecule of interest is introduced within the sol mixture, a two-stage scenario has been...
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