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This paper presents a general 4-port algorithm that can remove on-wafer parasitics from on-wafer measurements after impedance standard substrate (ISS) calibration of system errors, or remove both system errors and on-wafer parasitics in a single step without ISS calibration. On-wafer standards are fabricated on a 0.13 RF CMOS process, and experimental data are measured from 2 to 110 GHz using an HP...
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