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MgXZn1-XO, a ZnO-based ternary compound, has been recognized as a promising material to be used in UV light emitting devices, UV laser diodes and UV detectors. In this paper, a batch of MgxZn1-xO films were fabricated using radio frequency sputtering on glass substrates with a Mg0.32Zn0.68O target. Then the structure and the optical properties of these films after being treated at different annealing...