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The photoresist coating is an important micromachining process widely applied in engineering. The formed film should be uniform and enough thin to assure the quality of final pattern whose line width is micrometer or nanometer. It is more difficult to process it on the spherical surface than on the flat. In this work, mathematic model of film thickness on the spherical surface is proposed by using...
Two composite symmetry structure is proposed in this paper. Based on the integral equation method, the frequency response with large incident angle effect is analyzed. As a result of the numerical analysis, it is shown that the composite symmetry structure with single FSS screen is efficient to stabilize the drift of FSS resonant frequency with the steering of incident angle though transmission loss...
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