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TSV backside reveal is one of the key process modules for enabling 2.5D integration. This paper presents a robust and low cost solution for TSV backside reveal. 300mm wafers with a TSV size of 10µm×100µm are used to evaluate the proposed backside reveal solution. A high selective wet etching process with an etch rate of about 15 µm/min is used to replace conventional Si dry etching step for Si recess...
2.5D integration using TSV silicon interposer has attracted much attention in recent years for both front-end foundries and back-end packaging houses. TSV back revealing is one of the key process modules for the fabrication of 2.5D interposer. Two kinds of process flows for TSV revealing are introduced and compared in this paper. The first one uses Si-Cu co-polishing for copper revealing, which can...
In this paper we get new sampling formulae for reconstructing signals that are band limited in the Fractional Fourier Transform (FRFT) sense. We first give the signal representation using samples that taken at half the Nyquist rate from the signal and the first derivative of signal. Then we give another representation of signal using samples that taken at half the Nyquist rate from the signal itself...
Opportunistic networks have attracted attention from researchers because of their inherent characteristics, including long latency, low data rate, and intermittent connectivity. Extensive research has been conducted on opportunistic networks, including the architecture and routing. However, few researchers have investigated the performance of TCP in opportunistic networks, especially when Epidemic...
Reliable transmission in Intermittently Connected Mobile Networks (ICMNs) is a challenging work because the effective and reliable connection between the source and destination can not be sustained in ICMNs. To reliably hand over data to the destination, many dissemination-based routing protocols are proposed. Dissemination-based routing protocols assure nodes including intermediate nodes and destinations...
The theorems of identical relation for interpolation and decimation in the linear canonical transform (LCT) domain have been proposed in this paper. For improving the efficiency of sampling rate conversion and saving the memory in digital system, we propose two identical relations in sampling rate conversion, one in interpolation and the other one in decimation. The result shows that the two identical...
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