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We present a fabrication technique for the integration of a gate electrode with an array of carbon nanotube (CNT) emitters. These gated cathode structures have high emission current density and may be utilized in X-ray tubes, traveling wave tubes, and ion propulsion systems. The CNT emitters are grown directly on polished bulk metal substrates and are comprised of CNT bundles that are vertically aligned...
In this paper, we demonstrate enhanced field emission properties from MWNT emitters grown directly on the 80/20 NiCr alloy surface due to the grain boundary effect. The elemental segregation was clearly demonstrated by AES elemental mapping, where Cr and O surface segregation inhibited MWNT growth. The potential for this simple process is that it may be employed for fabricating CNT emitters without...
Carbon nanotube pillar arrays (CPAs) for cold field emission were fabricated using a conventional photolithography process, and the geometry of these arrays was studied and the effect of pillar height on field emission was quantified. Our CPA samples achieved turn-on fields as low as 0.9 V/mum and stable current densities of 10 mA/cm2 at applied field lower than 6V/mum.
In this paper we outline a process for the integration of gated CPAs. The process employed to fabricate this gated cathode is highly scaleable and promises the realization of stable high current cold cathodes with low turn-on voltages for many potential applications. In addition, we will present data detailing the field emission performance and reliability of gated carbon nanotube pillar arrays.
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