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The Frequency Tracking Oscillator (FTO) is being more and more used to drive vibrating MEMS sensors resonators (inertial sensors and mass sensors) because of its ability to control the phase shift over the resonator and thus to track the resonance frequency. The goal of this work is to study the FTO phase noise that determines the sensor resolution. First a phase noise model of the FTO is presented,...
In this paper, the performance analysis of our previously proposed architecture for MEMS resonator quality factor measurement is carried out in taking into account the imperfection of each functional block of the architecture. This analysis puts in evidence the impact of the imperfection of each functional block on the measurement precision and predicts the attainable measurement precision of this...
Many micro-electro-mechanical-system (MEMS) are based on the use of resonant mechanical structures. In this paper, we propose scanning electron microscopy techniques that allow a direct characterization of in-plane vibrations of small-size resonators. Implementation and performance of these techniques are illustrated by vacuum quality factor measurements of an electrostatically-driven polysilicon...
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