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We report a novel micromachined X-ray optics using DRIE formed micro mirrors for future space astronomical missions. We have fabricated a test optics and measured its imaging quality using X-rays. We have successfully verified the X-ray focusing using this type of optics for the first time in the world. The obtained angular resolution was about 20 arcmin and 3.1 mm. This result was consistent with...
X-ray optics based on MEMS technologies can provide future astronomical missions with ultra light-weight and high-performance optical systems. Curvilinear micropores vertical to a thin wafer are made by using DRIE (Deep Reactive Ion Etching) or X-ray LIGA. The side walls are smoothed by using magnetic field assisted finishing and annealing technologies in order that the walls can reflect X-rays. Two...
We have been developing novel microelectromechanical systems X-ray optics for future satellites. It can be ultra-lightweight and of high-resolution. For the first time, we fabricated a spherical test optics made of silicon. We used the dry etching and hot plastic deformation method. We conducted imaging tests to examine whether it can focus a parallel beam of light. Visible light was selected instead...
We invented novel ultra-lightweight and high-resolution MEMS (Micro Electro Mechanical Systems) X-ray optics for space X-ray telescopes. As a first step of R&D, we conducted optical image analysis of a spherically-shaped test optic with a radius of curvature of 1000 mm. Focusing of the parallel light was verified with our optic for the first time.
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