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This paper presents an approach for the process development of the out of plane silicon microneedles array fabrication. This study utilizes the wet etching technology using HNA to build a structure of sharp-tipped microneedles; biconvex-conical shaped. The height of the fabricated microneedle is 41.8 mum and the tip radii is 1.4 mum. Investigation on the effect of varying the mask opening window had...
Platinum membrane with silicon nitride layer is fabricated and analyzed. The membrane, which is designed for MEMS microphone application, is fabricated using sputter platinum and CVD silicon nitride. Membranes with sandwich layer of platinum-nitride-platinum with thickness of 6.35 mum are successfully fabricated. Deflection of the fabricated membrane corresponding to given pressure is measured using...
There has been some work in recent years to produce MEMS speakers. Geometries have included diaphragm structures, cantilever beams, and thermally actuated domes. The diaphragm skeleton is built out of the metal and glass layers of the CMOS chip, greatly reducing the layering ad patterning required, compared to other MEMS designs. "Brute multiplicity" is useful to circumvent the poor linearity...
A visual method is demonstrated for fabrication of silicon membranes by deep reactive ion etching (DRIE) and wet etching techniques. A DRIE cavity is created on silicon substrate closed to the membrane recess, and the backside of the wafer is etched by a wet etching process until it reaches the bottom of the DRIE cavity. Both isotropic and anisotropic wet etching with a loose control of temperature...
This is about CATV system on FTTH- PON network with a new idea dealing with multiple input points of the video broadcasting station by using the same wavelength of 1550 nm. The externally modulated intensity of different sources does not produce any interference that became an advantage of this system. The main purpose of this study is to determine the possibility of broadcasting of multiple inputs...
In this paper, a lateral capacitive MEMS accelerometer for low-g applications was designed and fabricated. The accelerometer is chosen to be based on an area-changed detection scheme. Area-changed accelerometers can provide alternatives in designing high sensitivity and low mechanical noise floor sensors as it is capable of providing a large proof mass. Based on the calculation of sensitivity and...
This study used finite element analysis (FEA) to simulate and analyze the mechanical performance of the comb-finger type capacitive accelerometer. Structure modeling by using ANSYSreg8.1 is validated by the available data. The success of the model in predicting the stiffness constant and resonant frequency of the proof mass of accelerometer provides further encouragement in using the model to analyze...
This paper characterizes the effect of various Sn-Ag-Cu solder compositions towards shear strength and melting behavior. Shear strength is measured by Dage which is representative of the inter-metallic compound (IMC) strength between the solder and solder clad of a C5 bump. Further study on melting properties will be obtained by Differential Scanning Calorimetry (DSC). It was found that lwt%Ag 0.5wt%...
Solder joining is one of the interconnection methods in microelectronic packaging. The robustness of the solder ball attachment to the packages determines the solder joint strength between solders and the under-bump metallization (UBM). This paper discussed the solder joint shear strength between Sn/4.0/0.5Cu with containing 20-50 ppm phosporus and Sn/3.8Ag/0.7Cu deposited onto selective plating Ni/Au...
This paper presents a general approach to the problem of modeling diaphragm micropumps. This study utilized the finite element method to optimize the deflection of a bilaminar circular plate which consist of a single piezoelectric disc as an actuator and bonded to an elastic diaphragm of certain dimensions. Optimum actuator dimensions were fixed for a determined diaphragm dimensions.
This paper describes the effect of design parameters of MEMS capacitive microphone on the static and dynamic behaviors. The aim is to develop the microphones with high sensitivity and flat frequency response. The high sensitivity can be obtained by changing the initial stress of diaphragm, sigmarmiddot diaphragm size, a, diaphragm thickness, t, back plate thickness, h, air gap thickness, d, back plate...
This paper presents the design and simulation of non-crossing differential capacitive MEMS accelerometer with electrostatic spring tuning. The accelerometers were designed with critical damping for 10 g range, mechanical sensitivity of 0.012 mum/g and thickness of 40 mum which is compatible with bulk micromachining process requirements. Simulations were carried out using IntelliSuite 7.2. Results...
In this paper, we describe our experience with deep reactive ion etching (DRIE) of silicon to depths ranging from 10 mum to more than 250 mum for MEMS applications, including MEMS microphone. The DRIE was produced in oxygen-added sulfur hexafluoride (SF6) plasma, with sample cooling to cryogenic temperature. We used an inductively coupled plasma reactive ion etcher and Al mask. A 90 min etching experiments...
Presented is a molecular beam epitaxial pre-growth-annealing simulation. Simulation done using Monte Carlo method by taking consideration of GaAs decomposition, As desorption and absorption process from the surface. Surface roughness information can be deducted from the percentages of step-edge-site density. It is compared to the specular reflected beam from reflected high energy electron diffraction...
This work is focused on the feasibility of using the transformer type linear model in describing both the static and the dynamic behaviour of the piezoelectric microgenerator subjected to an external vibration force in the z-axis, i.e, 33 mode. Using this model, the microgenerator output parameters (voltage & power) are studied according to the input parameters (force and frequency) for a certain...
A hydrogel-actuated microvalve that responds to changes in the concentration of glucose in an external liquid environment is described. The microvalve consists of a thin hydrogel, sandwiched between a stiff porous membrane and a flexible silicon rubber diaphragm. Swelling of the hydrogel forces the membrane to deflect therefore boss causes the valve to be opened. Simulations have been done by FEM...
This paper presents a design method that provides a better approximation for design parameter values of a silicon corrugated diaphragm for MEMS devices. This proposed method has been developed in order to realize the perfect corrugated diaphragm by using anisotropic etching technique. Due to restriction of the undercutting process, the wet anisotropic approach offers only limited patterns of silicon...
In this paper a new structure of clamped-clamped mixed muresonator (CCMR) of resonance frequency (fo) of 71 MHz, motional resistance of 3.7-KOmega, and Q as high as 6230 is designed, modeled, and simulated using a two-layers-beam composed of silicon nitride and copper. Intellisuite simulator is used to model the mechanical properties of the new MEMS resonator using a static displacement analysis,...
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