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We developed integration and three-dimensional (3D)-fabrication techniques to nanoscale-tip silicon-microprobe arrays for multiple electrical nano-measurement systems with a high aspect ratio. Vapor-liquid-solid (VLS) grown vertically-aligned 120??m-length silicon microprobe arrays (2??m-diameter), each with nanoscale-tip by controlling the silicon-etching (less than 100-nm-diameter, radius of curvature...
We have proposed a growth technique of various lengths, 2-4 mum diameter, conductive-silicon micowire arrays, by repeated vapor-liquid-solid (VLS) growth of n-type silicon, using Au as the growth catalyst and a mixture gas of 1% PH3 with 100% Si2H6 as the silicon gas source. We obtained a longer 100 mum-length silicon wire by both the first growth of 50 mum-length wire and an additional growth of...
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