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A Solidly Mounted Resonator (SMR) is an ultra-thin piezoelectric layer deposited between two electrodes which operates in longitudinal thickness mode. Minimization of dissipative losses is a major goal in SMR designs. For an accurate simulation of a SMR vibrating in vacuum, thermoelastic damping phenomenon related to the irreversible heat dissipation induced by the coupling between heat transfer and...
The realization of a stop-band filter constituted by a periodically patterned PZT layer, polarized along thickness, on silicon substrate and interdigitated electrodes (IDE) for emission/reception of guided elastic waves, is investigated. The filter characteristics are theoretically evaluated by using finite element simulations: dispersion curves of patterned PZT layer are computed for a given pattern...
Solidly Mounted Resonators (SMR) are alternatives to membrane resonators to realize Bulk Acoustic Wave (BAW) filters for RF communication systems. SMR decoupling from substrate, which is realized with a multi-layered Bragg reflector, has a major influence on resonator performance (quality factor, spurious modes). A finite element-boundary element (FEM-BEM) method is presented for two-dimensional SMR...
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