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In this paper, a high-order finite volume method is employed to solve the local energy approximation model equations for a radio-frequency plasma discharge in a one-dimensional geometry. The so called deferred correction technique, along with high-order Lagrange polynomials, is used to calculate the convection and diffusion fluxes. Temporal discretization is performed using backward difference schemes...
Summary form only given. Plasma enhanced chemical vapor deposition (PECVD) for the coating of micron and submicron sized particles, the idea of which originated from the behavior of plasma-generated particles in microelectronics fabrication, offers several advantages as compared to more traditional approaches. The particles are negatively charged, which prevents their agglomeration. Further, operating...
Summary form only given. Nanoparticles of various materials are building blocks and important constituents of ceramics and metal composites, pharmaceutical and food products, energy related products such as solid fuels and batteries, and electronics related products. The ability to manipulate the surface properties of these particles through deposition of one or more materials can greatly enhance...
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