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This paper deals with robotic micro-assembly of silicon micro-objects whose sizes are tens of micrometers. This production means is one of a more promising approach to realize 3D and/or hybrid microsystems. Current works in robotic micro-assembly are focused on the assembly of micro-objects on a large substrate. We are focusing in the study of micro-parts assembly to build microscopic subsystems usable...
Serial micro-assembly requires high precision robots able to produce translations and rotations to position and orient objects during assembly. In micro-scale, the translation ranges required are typically up to the millimeter and can be obtained with smart devices (piezomotor, etc.). In the other hand, the rotation ranges stay identical to the macroscale (eg. 90deg) and require standard guidings...
The development of new hybrid microsystems needs new technologies which are able to perform assembly of small micro-objects. Now, the current micromanipulation technologies are still unreliable for micro-objects which typical size is down to hundred micrometers. Consequently, the study and the development of innovative artificial micro-object manipulation strategies in these dimensions is particularly...
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