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• All use case study are completed in Klarity Reticle R2W proto type version • for inline control prospective, enable quick identification from repeaters to reticle defect • Optimization of reticle inspection & cleaning strategy • In product version, forward looking from reticle DOI to explore wafer is under developing • Critical reticle defect direct review • Progressive defect growth vs. Process...
In this letter, we investigate coherent acoustooptic coherent mode coupling from the LP01 core mode to LP1m cladding mode of a polarization-maintaining fiber (PMF) induced by two acoustic gratings. We show narrowband variable attenuation along either birefringent axis of the PMF by varying the relative phase between the two acoustic gratings. By launching two acoustic gratings at different frequencies,...
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