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This paper demonstrates a high accurate split mode tuning fork gyroscope with sub-degree per hour stability. The gyroscope sensing element is fabricated in an 80µm-thick SOI process and sealed in a wafer level vacuum package. Interfaced with an ultra low noise CMOS readout circuit, this gyroscope achieves 0.006 deg/√h angle random walk (ARW) and 0.18 deg/h bias instability. Its corresponding zero...
The implementation of the dual-mass MEMS vibratory gyroscope in device-level vacuum packing was presented. The electrostatic actuation and capacitive sensing methods were adopted in electrical design of gyroscope. The self-resonance drive circuit with automatic gain control was employed in the drive closed-loop, and the open loop detect circuit was used. In order to reduce environment impact on the...
The silicon microgyroscopes are very sensitive to the residual stresses, which degrade the microgyroscopes performance. This study used finite element analysis to simulate the residual stresses induced during the packaging process. The silicon microgyroscope is fabricated with SOG (silicon-on-glass) technology and packaged with ceramic packages. FEM simulation based on a simplified structure of the...
In this paper, we present work on the design, fabrication, readout technique and vacuum packaging of z-axis gyroscopes. A vacuum package that houses the gyroscope and its control electronics has bee built and tested. The entire gyroscope package including control electronics is approximately phi42 times 24mm in dimensions. This vacuum packaged gyroscope has a scale factor of 19.8mV/deg/sec with a...
The Micro Electrics Mechanics System (MEMS) gyroscope has the virtue of lower price, smaller size, lighter weight than of the traditional rate sensors. It can be widely used in the low-price inertial navigation system. But limited by its machining precision, the MEMS gyroscope usually has the large drift. Using the digital signal procession (DSP) of drift signal, the performance of the MEMS gyroscope...
This paper presents the design, simulation, fabrication and preliminary test results of a monolithic triaxial micromachined vibratory gyroscope. The device is a monolithic integration of two uniaxial in-plane (x- and y-axis) gyroscopes and one uniaxial out-of-plane (z-axis) gyroscope and the three individual gyroscopes are all actuated by electrostatic force and detected by capacitors. In order to...
Canceling and minimizing quadrature error is the key to improve the performance of MEMS gyroscopes. This paper addresses how to design suspension springs to decrease the quadrature error which induced with manufacture asymmetric. According to the stiffness matrix of suspension spring, the relationship among quadrature error, terms of stiffness matrix and width mismatch was put forward. The off-diagonal...
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