The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Parylene C neural probes with a 3D sheath structure are introduced as a novel interface for long-term intracortical neural recording. 3D sheath structures were assembled from surface micromachined Parylene microchannels by thermoforming the thermoplastic around a solid microwire mold. Multiple Pt electrodes lined the interior and exterior of the sheath. Electrochemical characterization of the electrodes...
Laterally actuated nanoelectromechanical (NEM) relays are implemented using a polysilicon structural layer with hafnium oxide (HfO2) and platinum dual sidewall layers. Atomic layer deposition (ALD) HfO2 provides electrical isolation between the polysilicon beam structure and the sputtered platinum conductive channel. Dual sidewall devices are demonstrated using a Y-shaped device with two contacts...
This paper presents low-voltage, high-aspect-ratio scaled lateral electrostatic actuators based on a four-mask multi-spacer process. The set of TEOS spacers, polysilicon hardmask, and buffer LTO layer is chosen as masking materials, resulting in a multi-spacer of LTO-TEOS and a stack of LTO-polysilicon hardmask. These mask sets with a photoresist mask are then transferred to an underlying polysilicon...
This paper reports on the modeling, fabrication, and testing of cantilever- and parallel plate-based laterally actuated platinum-coated polysilicon nanoelectromechanical (NEM) relays. The polysilicon acts as the structural layer, while the platinum serves as a conducting contact material, as well as a local routing layer. The two-part cantilever design utilizes a source made of a compliant beam in...
Carbon nanotubes (CNTs) with different diameters as a counter electrode to fabricate dye-sensitised solar cells with high conversion efficiency are investigated. The CNT electrodes with large diameter demonstrated better redox reaction and higher energy conversion efficiency.
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.