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A study was conducted on the use of the Finite Element (FE) method to determine key electrical parameters of a Flexural Plate Wave (FPW) device. This paper illustrates that the FE method can be successfully applied to extract admittance and frequency response characteristics of complex acoustic wave devices. Second order effects such as electromagnetic feedthrough, triple transit and diffraction can...
A model is developed to map the variation of sensitivity of a surface acoustic wave (SAW) resonator sensor over its surface, in order to find the region with maximum sensitivity. The model is based on a combined coupling of modes (COM) and periodic Green's function analysis. In order to extend the analysis to layered media, a new efficient technique is introduced to account for the mechanical interactions...
A two dimensional finite element model has been developed for the simulation of a layered flexural plate wave device using the ANSYS package. The simulated device consists of a 2.0 mum silicon nitride thin film, followed by a 0.4 mum aluminum ground layer. A 0.6 mum zinc oxide piezoelectric layer was defined to excite acoustic waves. Good agreement of device frequency response and displacement profiles...
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