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MEMS resonator exhibits extraordinary high sensitivity when used as bio-chemical sensor for detecting weight of specimen, adsorption of molecules, etc. by resonant frequency shift, in which piezoelectric transduction is effective to reduce power consumption for portable applications. However, the sensitivity is deteriorated by piezoelectric film due to its energy dissipation. This paper reviews our...
In-home healthcare and smart nursing are highly promoted recently by progress and advances in micro electromechanical systems (MEMS) and wireless sensor network (WSN) technology. In this work, a piezoelectric lead zirconate titanate (PZT) thin film actuated and sensed single crystal silicon disk resonator with excellent system integration capability, low driving voltage and great mechanical quality...
Highly intergrated silicon disk micro resonator with excellent quality factor, 1319 in air, was developed in this work for trace amount of chemicals detection. On resonator integrated piezoelectric PZT thin film enables low driving voltage (~0.2 V), good impedance matching with ICs and self actuation self sensing capability. The energy dissipation and other negative effects from PZT electrode stack...
A high quality factor (Q-factor) piezoelectric lead zirconat titanate (PZT) film actuated single crystal silicon cantilever was proposed in this paper for resonant based ultra sensitive mass detection. Intrinsic energy dissipation and other negative effects from PZT film were successfully compressed by separating the PZT actuator from the resonant structure. Excellent Q-factor, which is comparable...
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