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We have developed MEMS-based electrostatic field sensors (MEMS-EFS) composed of probe to detect electrostatic field and self-sensitive piezoelectric microcantilevers. The self-sensitive piezoelectric microcantilevers have Pb(Zr,Ti)O 3 (PZT) thin films for sensor and actuator. The MEMS-EFS were fabricated through sol–gel deposition of PZT thin films and MEMS microfabrication process. An output...
MEMS resonator exhibits extraordinary high sensitivity when used as bio-chemical sensor for detecting weight of specimen, adsorption of molecules, etc. by resonant frequency shift, in which piezoelectric transduction is effective to reduce power consumption for portable applications. However, the sensitivity is deteriorated by piezoelectric film due to its energy dissipation. This paper reviews our...
Power management technology is a fundamental issue in wireless sensor network. In this paper, we propose a concept of a piezoelectric flow sensor for a wake-up switch of a wireless sensor node to reduce the power consumption. The sensor detects air flow change surrounding the wireless sensor node by using a cantilever with Pb(Zr, Ti)O3 (PZT) thin film. We fabricated a prototype of the flow sensor...
The present study describes the MEMS-based piezoelectric switch to activate the event-driven wireless sensor node for chicken health monitoring system. We have fabricated the switch composed of “S” shaped piezoelectric cantilever and proof mass, where the resonance is 24 Hz. When the switch has been vibrated at 4, 6, 8, and 12 Hz, which is close to the chicken movement frequency, the input vibration...
We have developed the digital output piezoelectric accelerometer using CMOS-compatible AlN thin films. The AlN thin films were deposited by sputtering. The multilayer of Pt/Ti/AlN/Pt/Ti/SiO2 has been fabricated into the piezoelectric accelerometers, where the patterned AlN thin films are arrayed in parallel and electrically connected in series. The sensitivity of the fabricated accelerometer reaches...
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