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In this paper, we present electro-thermal analysis and design of a combined MEMS micro hotplate and interdigitated-capacitance impedance sensor for gas sensing application using nano-porous materials like metal organic framework (MOF). The effects of design parameters of interdigitated electrodes such as width(W) and gap(G) of the capacitor, metallization ratio, number of electrodes and area of the...
An increasing number of semiconductor companies have research programs related to MEMS products. This can be explained by the wide variety of application areas for MEMS, some mechanical MEMS examples are: filters, oscillators, pressure sensors, particle detection, thermometers and gyroscopes. Many mechanical MEMS operate in vacuum and sealing of the cavity can be obtained by using a wafer level thin...
MEMS (Micro Electro-Mechanical System) is a technology that offers significant advantages over various microscopic elecromechanical devices. In the field of MEMS products, pressure sensor represents a considerably mature technology and has been extensively used in a variety of applications. Nevertheless, packaging is a key issue among the processes of MEMS manufacture due to the specialty and complexity...
An increasing number of semiconductor companies have research programs related to MEMS resonators. This can be explained by the possible wide range of application areas. Many resonators operate in vacuum and sealing of the cavity can be obtained by using a Wafer Level Thin Film Package (WLTFP). To fit the MEMS-die into a small package it needs to be thinned. In this paper the effect of wafer thinning...
This paper presents a capillary-based cathode structure for air-breathing micro direct methanol fuel cell (muDMFC). An array of capillaries with hydrophilic surface is designed on the ribs of cathode window to draw out excessive water from the cathode. Microfabrication techniques, including double-side lithography and ICP, are used to fabricate anode and cathode plates of the muDMFC on the same silicon...
High frequency bending mode membranes are fabricated using a 1 mum PZT thick film deposited by sol-gel. Finite element analysis (FEA) is used to tailor the membrane radius to a resonant frequency in the 5-10 MHz frequency range. Using a radius of 16 and 24 mum, devices are produced as individual cells as well as 3 times 3 and 5 times 5 arrays. The arrays are designed so that the bottom electrode is...
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