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Silicon smart microchips with CMOS/MEMS technology are realized for Intelligent sensing. In our developed chips, new type sensor chips for bio-medical applications are presented especially here. One is Si microprobe electrode and tube array chips for recording of neurons in the tissue and drug deliver use. The probe array can be fabricated on IC chip, using standard IC process followed by a selective...
32 ?? 32 acetylcholine (ACh) image sensors using enzyme-immobilized polyion complex membrane were successfully required real time imaging of ACh distribution with better stability and improve responsibility. Nowadays, acetylcholine imaging technology has a lot of potential for human activity analysis and localization of disease. The proposed Charge-Transfer Technique ACh Image Sensor (CTTAIS) is a...
A highly sensitive L-glutamate biosensor based on glutamate oxidase (GLOx) has been fabricated on N-(3-dimethylaminopropyl)-N'-ethylcarbodiimide hydrochloride (EDC) activated thioglycolic acid (TGA) self assembled monolayer (SAM) on smart-biochips, where K3Fe(CN)6 and TGA-SAM are used as a mediator and an enzyme immobilization matrix, respectively. The glutamate biosensor displayed a fast response,...
This research succeeded in capturing the behavior of potassium ion as moving image for the first time. A 2-dimensional potassium ion image sensor has been developed successfully. 32times32-pixels potassium ion image sensor was successfully fabricated by using CCD/CMOS image sensor technique and coating technology of organic responsive membranes. The sensor can take images of the concentration distribution...
We report applications of sub-5 μm diameter silicon microprobes and silicon dioxide microtubes fabricated by vapor-liquid-solid method and microfabrication techniques, to use in in-vivo animal experiments. Before animal experiments, electrical impedance and test signal detection via the microprobe electrode were investigated. According to the results, electrical impedance at 1 kHz is approximately...
This paper reports on a novel technique for realizing submicron and micron diameter SiO2 tubes on a Si substrate for biomedical applications such as, for example, patch clamps. The tube arrays have been successfully fabricated on Si substrates using a selective vapor-liquid-solid (VLS) growth method combined with MEMS techniques. The size of the tubes is typically between 0.2 mum and 2 mum in diameter...
In this study, a CMOS process-compatible MOSFET-type biosensor with a built-in Ag/AgCI thin film reference electrode have been fabricated on the same chip. Au was used as the gate metal of the MOSFET-type biosensor in order to immobilize biomolecules. Electrical characteristics of the MOSFET-type biosensor is quite stable and similar to the characteristics of the biosensor with the conventional Ag/AgCI...
32 x 32 pH image sensors were successfully fabricated by using the CCD/CMOS image sensor technique, and real time imaging of a chemical reaction and pH distribution was carried out for the first time. The pH variations by a chemical reaction are observed by 200 ms step (i.e. 5 flames per sec). The pH image sensor was able to take a pH image of mouse stomach successfully. It means that the novel image...
The charge transfer type blood glucose sensor (CTTGS) has been proposed. The CTTGS is an accumulation method H+ ion (gluconic acid) perception system. As compared to cyclic-voltammetry and ISFET, the performance was found to be excellent with span and range of 1445 mV and 200 mmol/L respectively. The sensitivity obtained for blood glucose level of the person was 29.06 mV/mmol with a non-linear error...
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