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This paper reports `non-linear' micro fluidic integrated circuit technology using newly developed vertical microvalve, Pneumatic-field effect transistor (Pneumatic-FET) with controllability of its output resistance. In addition to the basic linear amplifiers of pressures obtained by positive output resistance of pneumatic-FET, the negative output resistance is attractive to realize non-linear functions...
This paper reports about a novel wafer-level integration technique of discrete surface mount devices (SMDs). It enables wafer-level mounting of plural kinds of SMDs on a silicon (Si)-wafer using vibration and gravity force. Deep holes with 400-m depth are formed on the surface of a Si-wafer by deep reactive ion etching process after general integrated circuit process for positioning of SMDs. A non-conductive...
This paper reports on the development of neural recording chip device with penetrating Si microprobe electrode array using IC-process. The Si microprobe electrode array each with a few microns in diameter was grown at predetermined positions with interconnection-wirings. Controlling the diameter and the length of Si probes can be realized by a selective vapor-liquid-solid (VLS) growth. In this work,...
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