The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Micro-electro-mechanical systems (MEMS) technology can offer a viable alternative to realize miniaturized and less expensive actuators for deformable mirror in adaptive optics for high resolution retinal imaging. However, during fabrication of such devices, functional multilayered thin films are generally deposited at elevated temperatures. These films are therefore subjected to residual stresses...
Silicon smart microchips with CMOS/MEMS technology are realized for Intelligent sensing. In our developed chips, new type sensor chips for bio-medical applications are presented especially here. One is Si microprobe electrode and tube array chips for recording of neurons in the tissue and drug deliver use. The probe array can be fabricated on IC chip, using standard IC process followed by a selective...
We have proposed a growth technique of various lengths, 2-4 mum diameter, conductive-silicon micowire arrays, by repeated vapor-liquid-solid (VLS) growth of n-type silicon, using Au as the growth catalyst and a mixture gas of 1% PH3 with 100% Si2H6 as the silicon gas source. We obtained a longer 100 mum-length silicon wire by both the first growth of 50 mum-length wire and an additional growth of...
Vapor-liquid-solid (VLS) growth, using Si2H6 as the gas source of Si, can be used to realize intrinsic Si microprobe arrays, which could be doped by diffusion process (at 1100degC) after VLS growth. But in this work we have demonstrated that by incorporating in-situ doping using the gas source of Si2H6 and PH3 with VLS growth process, doped n-Si microprobes can be realized directly at a temperature...
A piezoelectric ultrasonic hydrophone array was fabricated using diaphragm transducer on Si substrates. A two dimensional (2-D) array of 8 times 8 elements with diaphragm transducer has been developed by XeF2 etching from the topside of Si. In this paper, we describe the fabrication process of the diaphragm transducer array. A finite-element analysis (FEA) was calculated to evaluate the resonant frequency...
This paper reports a new post-CMOS process to integrate thick (>10 mum) SOI MEMS devices after standard CMOS process, which requires only three additional photomask steps. The additional MEMS processes are not severe and critical for the integrated CMOS devices. In this technology, high aspect ratio SOI MEMS devices and CMOS integrated circuits are electrically connected with 'micro bridge interconnection'...
In this paper, a novel concept of multi-functional MEMS tactile imager using flexible deformation of silicon IC for advanced tactile sensing applications is presented. Integration design of multi-functional tactile imager with sensing abilities of contact-force, hardness and temperature distributions is totally discussed based on their measured performances. This tactile sensor has a sensing region...
This paper reports on the development of neural recording chip device with penetrating Si microprobe electrode array using IC-process. The Si microprobe electrode array each with a few microns in diameter was grown at predetermined positions with interconnection-wirings. Controlling the diameter and the length of Si probes can be realized by a selective vapor-liquid-solid (VLS) growth. In this work,...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.