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In this study, we present a hybrid wireless smart temperature sensor using thermoelectric sensor and wireless transmitter. The thermoelectric sensor using SOI structure consists of 17 pairs of n- and p-type single-crystal silicon strips and selective absorption area. The sensitivity of the fabricated thermoelectric sensor was found to be approximately 190μV/°C. The wireless transmitter consists of...
Silicon smart microchips with CMOS/MEMS technology are realized for Intelligent sensing. In our developed chips, new type sensor chips for bio-medical applications are presented especially here. One is Si microprobe electrode and tube array chips for recording of neurons in the tissue and drug deliver use. The probe array can be fabricated on IC chip, using standard IC process followed by a selective...
In this paper, we present designing, fabrication and thermal simulation of smart 1024-element (32 × 32) monolithic pyroelectric infrared image sensors. A sol-gel deposited PZT(001) thin film was used as a pyroelectric material. We tailored the geometries and dimensions of devices in designing smart image sensors. The influence of thermal isolator has shown to significantly reduce the heat loss to...
This paper presents the evaluation of the prototype of an integrated smart microsensor system that has been developed to monitor the motion and vital signs of humans in various environments. Integration of radio frequency transmitter (RF) technology with complementary metal-oxide-semiconductor/micro electro mechanical systems (CMOS/ MEMS) microsensors is required to realize the wireless smart microsensors...
Silicon smart microchips with CMOS/MEMS technology are realized for intelligent sensing. In our developed chips, tow new type sensor chips are presented here. One is Si microprobe electrode array for using in the recording of neurons in the tissue. The probe array can be fabricated on IC chip, using standard IC process followed by a selective Si probe growth. Another one is pH image sensors successfully...
This paper presents the development of monolithically integrated RF transmitters and antennas for MEMS sensors such as accelerometers. Integrating wireless-communication ability on-chip microsensor, sensors can communicate the sensing data with information network by wireless. Integration technology of MEMS sensors, and RF-CMOS including RF passive components is requited to realize highly integrated...
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