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In this study, we present a hybrid wireless smart temperature sensor using thermoelectric sensor and wireless transmitter. The thermoelectric sensor using SOI structure consists of 17 pairs of n- and p-type single-crystal silicon strips and selective absorption area. The sensitivity of the fabricated thermoelectric sensor was found to be approximately 190μV/°C. The wireless transmitter consists of...
This paper presents the development of monolithically integrated RF transmitters and antennas for MEMS sensors such as accelerometers. Integrating wireless-communication ability on-chip microsensor, sensors can communicate the sensing data with information network by wireless. Integration technology of MEMS sensors, and RF-CMOS including RF passive components is requited to realize highly integrated...
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