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In this study, we propose a novel sensing device for small olfactory chips which can be installed on mobile such as smart phone. The device comprises gas-sensitive films deposited on surface potential sensor arrays, which is integrated in a single chip with the area of 7.3 mm2. The chip has 128 × 128 elements with the element size of 37.30 × 37.30 pm2. Three kinds of the gas-sensitive film were separately...
Micro-electro-mechanical systems (MEMS) technology can offer a viable alternative to realize miniaturized and less expensive actuators for deformable mirror in adaptive optics for high resolution retinal imaging. However, during fabrication of such devices, functional multilayered thin films are generally deposited at elevated temperatures. These films are therefore subjected to residual stresses...
This paper presents the dynamic behavior of a piezoelectric MEMS actuator using finite element simulations taking anisotropic properties of silicon chip and technologically induced stress into account. Silicon anisotropy has shown to shift eigenfrequencies particularly in higher eigenmodes compared to that of isotropic case. Technologically induced stress has resulted in substantial influence on both...
This research succeeded in capturing the behavior of potassium ion as moving image for the first time. A 2-dimensional potassium ion image sensor has been developed successfully. 32times32-pixels potassium ion image sensor was successfully fabricated by using CCD/CMOS image sensor technique and coating technology of organic responsive membranes. The sensor can take images of the concentration distribution...
We have investigated numerically the optimization of newly designed Pb(Zr,Ti)O3 (PZT) actuated segmented μ-mirror device used particularly in bio-medical application for adaptive optics. By performing advanced finite element modeling that includes thermo-mechanical and piezoelectric simulations an optimal μ-mirror device design is suggested maintaining its structural integrity intact.
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