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We report on inkjet printing of silver nanoparticles on paper for the design of resistive temperature and capacitive humidity sensors. Temperature and humidity have shown to have an influence on the electrical and mechanical properties of the Ag printed structures on paper. The passivation of the paper substrate and the Ag structures with parylene was investigated to reduce these effects and improve...
We report on multi-sensor platforms on plastic foils for environmental monitoring. Polymer-based capacitive sensors for humidity and volatile organic compounds (VOC)s, semiconducting metal oxides (MOX) based chemoresistive sensors for reducing/oxidizing gases and a Pt thermometer have been integrated together on a polyimide sheet and their performances characterized. The MOX gas sensors exhibited...
Temperature, gas and humidity resistive/ capacitive sensors on flexible substrates from organic materials, suitable for RFID mobile applications, have been produced and investigated. The sensor implementation solutions are providing simple, versatile and low power temperature and gas detection. The device structure was developed together with the data evaluation strategies based on last generation...
Titanium nitride has been investigated as a heater material for hotplates and microreactors. TiN is CMOS compatible, and has a higher melting point (2950 degC) than conventional heaters of Pt and poly-Si. For the first time, TiN is tested inside a conventional membrane of LPCVD SiNx. Two types of TiN are considered: high stress and low stress. Their performance is compared with that of Pt. The maximum...
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