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Wafer fabrication tends to small batch, and single wafer processing is effective in cluster tools. With the decrease of processes, redundant processing modules are adopted to improve the utilization of cluster tools. The scheduling of mixed-processing of multi-variety wafers should be developed for dual-armed cluster tools. Based on resource oriented Petri net model, we analyze the process by the...
Probabilistic model checker plays an important role in quantitative verification for required properties of probabilistic behavior model. PRISM is a well-used tool to be used as a probabilistic model checker. It takes PRISM language to describe probabilistic behavior model. But it is difficult for users of variety background to understand the PRISM language quickly. Meanwhile, manually writing is...
There are two principal ideologies in present digital library evaluation model. Divarication between them demonstrates the immaturity of evaluation research to some extent. To resolve such divarication can't only rely on the surface reference and complement from each other, but explore the intrinsic problem of divarication, then we can get ride of constraints and re-building a brand-new evaluation...
Speed estimation in field-oriented vector control of induction motor depends on effective estimation of rotor flux. This paper proposes speed estimator using improved rotor flux estimator based on modified voltage model with a high orders low-pass filter (LPF) and a low-pass filter in series and an error compensator by rotor flux oriented current model. In the flux estimation based on voltage model,...
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