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Large amount of acidic liquids, such as H 2 SO 4 , HF, HCl and HNO 3 , and basic NH 3 liquid are used in high-tech industries in cleaning and etching processes in the Hsinchu Science-Based Industrial Park in Taiwan. The industries use packed towers (or scrubbers) to control emission of these inorganic pollutants, in which acidic gases but not particles are regulated...