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This paper introduces the operation concept, fabrication and feasibility of the MEMS digital accelerometer using a microscale liquid-metal (LM) droplet in a microstructured glass channel formed by a photosensitive (PS) glass. Our device employs the advantageous properties of the LM droplet (i.e., high surface tension, high density and electrical conduction) and the PS glass (i.e., photo-definable...
This paper presents a novel MEMS inertial switch using a microscale liquid-metal droplet as an active component. Our inertial switch is realized using the advantageous properties of the liquid-metal droplet (i.e., high surface tension, high density and electrical conduction) and the selectively modified contact surface. The modified contact surface contains microstructures which provide enhancement...
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