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Zinc oxide is widely used as transparent contact in thin film solar cells. We investigate the damp heat stability of aluminum doped ZnO (ZnO:Al) films sputter deposited at different conditions. Increase in resistivity upon damp heat exposure was observed for as-deposited ZnO:Al films and the water penetration was directly linked to this degradation. Deuterium was used as isotopic marker to identify...
Texture etched zinc oxide is often used as transparent front contact for silicon thin film solar cells. Reactive sputtering is a potentially low-cost process. However, process stability, film uniformity, and reproducibility are challenges to be solved. Oscillations of the control signal and subsequent reaction of the plasma emission control with moving substrates from rotatable metallic targets cause...
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