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A micro-scale mechanical charge pump, cf. Fig. 1(a), comprising a circuit of micromechanical resonant switches (a.k.a., resoswitches) has been demonstrated that generates 3V and 9V from 1V and 3V power supplies, respectively, using a 2-stage design; and 6V from 1V supply using a 5-stage design; all while avoiding the diode voltage drop and breakdown voltage limitations of conventional CMOS-based charge...
The vector components of acceleration sensitivity Γ for a closed-loop oscillator referenced to a wine-glass disk array-composite resonator employing tiny (~92 nm) electrode-to-resonator capacitive transducer gaps were measured along axes perpendicular and parallel to the substrate to be Γvertical~13.6ppb/g and Γlateral~4.92ppb/g, respectively, which are on par with commercial quartz-based oscillator...
A statistical comparison between the resonance frequency variations of stand-alone micromechanical disk resonators and mechanically-coupled array composites of them reveals that mechanically-coupled arraying of on-chip micromechanical resonators can very effectively enhance the manufacturing repeatability of resonance frequencies. In particular, twenty 3-disk resonator array-composites on a single...
It is easy to find that the rotor of the cell phone vibration motor touches its outer case or magnet during assemblage, due to the poor verticality of shaft or jet burr. It is a fatal fault to result in the rejection. The main method to detect this kind of fault is the manual work up to now. The paper puts forward a high sensitive and automatic fault detection system based on MEMS, embedded system...
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